SIMULATION OF PULL-IN EFFECT IN MEMS CAPACITOR USING GUI IN MATLAB

near the 2/3rd of total gap between the plates the response of the mems capacitor gets unstable.

When voltage is applied over the capacitance, electrostatic force will work to reduce the plate separation d −x. At small voltages, the electrostatic voltage is countered by the spring force Fk = kx but as voltage is increased the plates will eventually snap together. Estimating this pull-in voltage UP and the plate travel distance x before pull-in effect is required for the successful design of electrostatic actuators, switches, varactors, and sensors.